Thin Film Activation:

p-type: Al (SiC), Mg (GaN), B (Si)

n-type: N2 (SiC), N2 (GaN), As/P (Si)

Silicide Formation:

Si / SiC Substrates

Mobility Enhancement of Thin Conductive Crystalline Films:

Si, Ge, Cu, Ag, ITO, IGZO